The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2024

Filed:

Jan. 27, 2021
Applicant:

Phase Sensitive Innovations, Inc., Newark, DE (US);

Inventors:

Shouyuan Shi, Newark, DE (US);

Dennis Prather, Newark, DE (US);

Peng Yao, Newark, DE (US);

Janusz Murakowski, Bear, DE (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01Q 3/26 (2006.01); G03F 7/00 (2006.01); G03F 7/16 (2006.01); H01Q 21/06 (2006.01); H01Q 1/22 (2006.01); H01Q 1/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0005 (2013.01); G03F 7/16 (2013.01); H01Q 3/2676 (2013.01); H01Q 21/062 (2013.01); H01Q 21/065 (2013.01); H01Q 1/2283 (2013.01); H01Q 1/38 (2013.01);
Abstract

This disclosure is directed to two-dimensional conformal optically-fed phased arrays and methods for manufacturing the same. The method includes providing a wafer substrate, depositing a first cladding layer on the wafer substrate, and depositing a core layer on the first cladding layer. The method further includes photolithographically patterning the core layer to provide a plurality of optical waveguide cores, and depositing a second cladding layer on the core layer to cover the plurality of optical waveguide cores to provide a plurality of optical waveguides. In addition, the method includes forming a plurality of antennas on the second cladding layer, each antenna of the plurality of antennas located near a termination of a corresponding optical waveguide of the plurality of optical waveguides, and providing a plurality of photodiodes on the second cladding layer, each photodiode of the plurality of photodiodes connected to a corresponding antenna.


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