The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Jun. 16, 2022
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Kasumi Okabe, Nagoya Aichi, JP;
Takeshi Higuchi, Yokohama Kanagawa, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 15/08 (2006.01);
U.S. Cl.
CPC ...
G01N 15/082 (2013.01); G01N 15/0806 (2013.01); G01N 2015/0846 (2013.01);
Abstract
A measuring method includes: placing resiston a surface of a test film; pressing a templateagainst the resistplaced on the surface of the test film; measuring a size of a void formed in the resistafter pressing the templateagainst the resist; and determining gas permeability of the test film based on the size of the void.