The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Oct. 07, 2021
Applicant:

Samsung Display Co., Ltd., Yongin-Si, KR;

Inventors:

Woosuk Jung, Yongin-si, KR;

Jaeheung Ha, Suwon-si, KR;

Wonjong Kim, Suwon-si, KR;

Jongwoo Kim, Hwaseong-si, KR;

Heeyeon Park, Seoul, KR;

Changyeong Song, Suwon-si, KR;

Hyein Yang, Siheung-si, KR;

Yongchan Ju, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10K 71/00 (2023.01); H10K 50/844 (2023.01); H10K 50/858 (2023.01); H10K 102/00 (2023.01);
U.S. Cl.
CPC ...
H10K 71/00 (2023.02); H10K 50/844 (2023.02); H10K 50/858 (2023.02); H10K 2102/00 (2023.02); H10K 2102/351 (2023.02);
Abstract

A method of manufacturing a display device includes forming a light emitting structure on a substrate and forming a thin film encapsulation layer on the light emitting structure by chemical vapor deposition equipment. The forming the thin film encapsulation layer includes forming a first inorganic layer and performing a first plasma treatment on a first portion of the first inorganic layer which is opposite to a second portion of the first inorganic layer facing the light emitting structure. A first raw material in the forming the first inorganic layer includes hydrogen. A second raw material in the performing the first plasma treatment exclusively consists of hydrogen.


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