The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Dec. 23, 2022
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventor:

Yoshihiro Uozumi, Shinagawa, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/50 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 24/05 (2013.01); H01L 21/50 (2013.01); H01L 21/78 (2013.01); H01L 2224/83895 (2013.01); H01L 2224/83896 (2013.01); H01L 2224/94 (2013.01);
Abstract

A method for manufacturing a semiconductor device is provided, including: preparing a first chip forming portion having a first semiconductor substrate, first metal pads provided at the substrate and a first circuit electrically connected to at least a part of the pads, and a second chip forming portion having a second semiconductor substrate, second metal pads provided at substrate and a second circuit electrically connected to at least a part of the pads; bonding the first and the second chip forming portions while joining the first and the second pads to form a bonding substrate having a non-bonded region between the first and the second chip forming portions at an outer peripheral portion thereof; and filling an insulating film into the non-bonded region, at least a part of the insulating film containing at least one selected from the group consisting of silicon nitride and nitrogen-containing silicon carbide.


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Uozumi, Yoshihiro. (2024). Semiconductor device and method for manufacturing the same (U.S. Patent No. 12068267). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12068267

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