The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Feb. 12, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Ming Xu, San Jose, CA (US);
Ashley Mutsuo Okada, San Jose, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Duc Dang Buckius, San Jose, CA (US);
Jeffrey Ludwig, San Jose, CA (US);
Aditi Mithun, San Jose, CA (US);
Benjamin Schwarz, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas distribution apparatus is provided having a first reservoir with a first upstream end and a first downstream end and a second reservoir with a second upstream end and a second downstream end. A reservoir switch valve is in fluid communication with the first downstream end of the first reservoir and the second downstream end of the second reservoir. The reservoir switch valve operable to selectively couple the first reservoir to an outlet of the reservoir switch valve when in a first state, and couple the second reservoir to the outlet of the reservoir switch valve when in a second state. A plurality of proportional flow control valves are provided having inlets coupled in parallel to the outlet of the reservoir switch valve The plurality of proportional flow control valves have outlets configured to provide gas to a processing chamber.