The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Jul. 27, 2020
Applicant:

Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Denis Pelenc, Grenoble, FR;

Giacomo Badano, Grenoble, FR;

Alexi Cardoso, Veurey-Voroize, FR;

Marc Guillaumont, Veurey-Voroize, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/04 (2006.01); G01J 5/20 (2006.01); H10N 15/10 (2023.01);
U.S. Cl.
CPC ...
G01J 5/046 (2013.01); G01J 5/045 (2013.01); G01J 5/20 (2013.01); H10N 15/15 (2023.02);
Abstract

A process for producing a microbolometer including a vanadium-oxide-based sensitive material containing an additional chemical element chosen from arsenic, germanium, silicon and phosphorus, the process including: determining an effective amount of the additional chemical element from which the modified compound, having undergone a step of exposure to a temperature Tfor a time Δt, exhibits an electrical resistivity ρat room temperature that is higher than 10% of its native value; producing the sensitive material in a thin layer, this material being formed from the modified compound having an amount of the additional chemical element that is greater than or equal to the effective amount; and exposing the sensitive material to the temperature Tfor the time Δt.


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