The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Feb. 10, 2021
Edwards Japan Limited, Yachiyo, JP;
Hideo Fukami, Yachiyo, JP;
Edwards Japan Limited, Yachiyo, JP;
Abstract
A vacuum pump that allows for timely inspection and replacement of a temperature adjustment means, prevents unexpected stopping, and limits the maintenance cost, and a controller that controls the vacuum pump are proposed. The present disclosure relates to a vacuum pump for exhausting gas from an apparatus, such as manufacturing equipment, subjected to exhaustion. The vacuum pump includes: a temperature adjustment means for causing a predetermined area of the vacuum pump to have a predetermined temperature; an output control means configured to operate the temperature adjustment means; and an information output means configured to output information regarding ON/OFF of the temperature adjustment means obtained from the output control means.