The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

May. 16, 2022
Applicant:

Kokusai Electric Corporation, Tokyo, JP;

Inventors:

Mikio Ohno, Toyama, JP;

Atsushi Umekawa, Toyama, JP;

Takeo Hanashima, Toyama, JP;

Hiroaki Hiramatsu, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/34 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); H01L 21/02 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/345 (2013.01); C23C 16/44 (2013.01); C23C 16/45563 (2013.01); C23C 16/463 (2013.01); H01L 21/02271 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67393 (2013.01);
Abstract

There is provided a gas supply system including a supplying part connected to a reaction vessel and a blocking part provided at an upstream side of the supplying part and directly connected to the supplying part without providing a pipe between the blocking part and the supplying part. The gas supply system further including a switching part provided at an upstream side of the blocking part and configured to supply a gas into the reaction vessel in cooperation with the blocking part and an exhaust part configured to exhaust an inside of a pipe provided between the switching part and the blocking part.


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