The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Oct. 22, 2021
Uchicago Argonne, Llc, Chicago, IL (US);
Boise State University, Boise, ID (US);
Anil U. Mane, Naperville, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Donghyeon Kang, Chicago, IL (US);
Sara Kuraitis, Boise, ID (US);
Elton Graugnard, Boise, ID (US);
UCHICAGO ARGONNE, LLC, Chicago, IL (US);
BOISE STATE UNIVERSITY, Boise, ID (US);
Abstract
A method of making thin films of sodium fluorides and their derivatives by atomic layer deposition ('ALD'). A sodium precursor is exposed to a substrate in an ALD reactor. The sodium precursor is purged, leaving the substrate with a sodium intermediate bound thereon. A fluorine precursor is exposed to the bound sodium intermediate in the ALD reactor. The fluorine precursor is purged and a sodium fluoride film is formed on the substrate.