The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Apr. 14, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Joseph A. Van Gompel, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 7/20 (2006.01); B01J 19/08 (2006.01); B01J 19/14 (2006.01); C01B 21/04 (2006.01);
U.S. Cl.
CPC ...
C01B 7/20 (2013.01); B01J 19/081 (2013.01); B01J 19/14 (2013.01); C01B 21/0405 (2013.01); B01J 2219/00042 (2013.01); B01J 2219/0894 (2013.01);
Abstract
A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine.
Van Gompel, Joseph. (2024). Portable fluorine generator for on-site calibration (U.S. Patent No. 12065359). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12065359
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile