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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12062565 B1

PDFFull Text
Date of Patent:
Aug. 13, 2024

Filed:

Jun. 24, 2022

Electrostatic chuck, assembly including the electrostatic chuck, and method of controlling temperature of the electrostatic chuck

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Joaquin Aguilar Santillan, Gilbert, AZ (US);

Hong Gao, San Jose, CA (US);

Shanker Kuttath, Austin, TX (US);

ChangMin Lee, Hwaseong-si, KR;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Dharti H Patel

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01);
Abstract

Electrostatic chucks and methods of using electrostatic chucks are disclosed. Exemplary electrostatic chucks include a ceramic body, a heating element embedded within the ceramic body, and two or more temperature measurement devices embedded within the ceramic body. Exemplary methods include measuring temperatures within the electrostatic chuck using two or more vertically spaced-apart temperature measurement devices.

Find Patent Forward Citations

Aguilar Santillan, Joaquin. (2024). Electrostatic chuck, assembly including the electrostatic chuck, and method of controlling temperature of the electrostatic chuck (U.S. Patent No. 12062565). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12062565

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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