The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Oct. 06, 2021
Applicant:
Ichor Systems, Inc., Fremont, CA (US);
Inventors:
Chris Melcer, Santa Cruz, CA (US);
Phillip Ryan Barros, Pleasanton, CA (US);
Haruyuki Kubota, San Francisco, CA (US);
Randolph Treur, San Luis Obispo, CA (US);
Todd Mark Cushman, Santa Clara, CA (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F16J 15/10 (2006.01); F16K 27/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); F16J 15/104 (2013.01); F16J 15/106 (2013.01); F16K 27/003 (2013.01); Y10T 137/5109 (2015.04); Y10T 137/5283 (2015.04);
Abstract
A method of processing semiconductors using a fluid delivery system is disclosed in which seal inserts are utilized to fluidly connect an active component that bridges two substrate blocks.