The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2024

Filed:

Dec. 14, 2020
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Hideyuki Ishihara, Shizuoka, JP;

Toshiya Takahashi, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/039 (2013.01); G03F 7/2037 (2013.01);
Abstract

The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition including, as a solvent, ethyl lactate in which one of an L isomer or a D isomer of optical isomers has a ratio of 1% or more higher than that of the other, an actinic ray-sensitive or radiation-sensitive film formed using the actinic ray-sensitive or radiation-sensitive resin composition, a pattern forming method, a photo mask, and a method for producing an electronic device.


Find Patent Forward Citations

Ishihara, Hideyuki. (2024). Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, and photo mask (U.S. Patent No. 12061418). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12061418

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…