The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Mar. 02, 2021
The Regents of the University of Michigan, Ann Arbor, MI (US);
Ya Sha Yi, Troy, MI (US);
Da Chuan Wu, Ann Arbor, MI (US);
The Regents of The University of Michigan, Ann Arbor, MI (US);
Abstract
Beam steering device such as optical phased array (OPA) is a key component in applications of solid-state LIDAR and wireless communication. The traditional single-layer OPA results in a significant energy loss due to the substrate leakage caused by the downward coupling from the grating coupler structure. In the present disclosure, we have investigated a structure based on multi-layers SiN/SiOplatform that can form a 3D OPA to emit the light from the edge of the device with a high efficiency, a 2D converged out-coupling beam will be end-fired to the air. The high efficiency and wide horizontal beam steering are demonstrated numerically, the influence of vertical crosstalk, the delay length, number of waveguide layers, and the fabrication feasibility are also discussed.