The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
May. 05, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
David Coumou, Webster, NY (US);
Xiaopu Li, San Jose, CA (US);
Michelle SanPedro, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 19/00 (2006.01); G01R 15/18 (2006.01); G01R 19/165 (2006.01); G01R 19/25 (2006.01);
U.S. Cl.
CPC ...
G01R 19/0007 (2013.01); G01R 15/18 (2013.01); G01R 19/16533 (2013.01); G01R 19/2513 (2013.01);
Abstract
Embodiments disclosed herein include a sensor. In an embodiment, the sensor comprises a board, wherein an aperture is formed through the board, a current loop winding through the board around the aperture, and a voltage ring around the aperture and within an inner perimeter of the current loop, wherein the voltage ring comprises an interior ring, an insulator ring around the interior ring, and an exterior ring around the insulator ring.