The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2024

Filed:

Oct. 15, 2020
Applicant:

Vat Holding Ag, Haag, CH;

Inventors:

Alejandro Marzinotto, Sennwald, CH;

Adrian Eschenmoser, Werdenberg, CH;

Andreas Hofer, Chur, CH;

Frantisek Balon, Sevelen, CH;

Michael Zickar, Goldach, CH;

Assignee:

VAT HOLDING AG, Haag, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 41/10 (2006.01); F16K 31/04 (2006.01); F16K 37/00 (2006.01); F16K 51/02 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
F16K 37/005 (2013.01); F16K 31/04 (2013.01); F16K 41/10 (2013.01); F16K 51/02 (2013.01); H01L 21/68742 (2013.01);
Abstract

Vacuum adjustment device for an active element movable in a process atmosphere region, having a coupling, a drive unit having an electric motor, which cooperates with the coupling in such a way that the coupling can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device to a process volume providing a process atmosphere, a dynamic separating device for separating the process atmosphere from an outer atmosphere region and a control and processing unit at least electrically connected to the drive unit and designed to control the electric motor. The control and processing unit is designed to derive motor state information based on the extent of a motor operating parameter, and has a pressure determination functionality designed in such a way that a load difference is derived by comparing the motor state information with a known motor target state, and a pressure difference between the outer atmosphere region and the process atmosphere region is derived on the basis of the load difference.


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