The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Mar. 17, 2021
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Kakeru Takahashi, Tokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump includes a cryopump container, a pressure sensor that measures a pressure in the cryopump container and generates time-series pressure data indicating the measured pressure, a vent valve that is provided on the cryopump container, is electrically operable to open and close, and is capable of being mechanically opened by a differential pressure between inside and outside the cryopump container, and a controller that, during cryopump regeneration, detects stabilization of the measured pressure based on the time-series pressure data from the pressure sensor and controls the vent valve to open upon detection of the stabilization of the measured pressure.