The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
May. 03, 2021
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Katsuhiro Komuro, Osaka, JP;
Koji Ichikawa, Osaka, JP;
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C 381/12 (2006.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/16 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
C07C 381/12 (2013.01); G03F 7/0045 (2013.01); G03F 7/2041 (2013.01); G03F 7/168 (2013.01); G03F 7/40 (2013.01);
Abstract
A carboxylate represented by formula (I), a quencher and a resist composition including the same: wherein R, Rand Reach represent a halogen atom, an alkyl fluoride group or a hydrocarbon group which may have a substituent, —CH— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO—, m1 represents an integer of 0 to 5, m2 represents an integer of 0 to 4, m3 represents an integer of 0 to 3, and Xrepresents a single bond, —CH—, —O—, —S—, —CO—, —SO— or —SO—.