The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Jan. 17, 2020
Samsung Display Co., Ltd., Yongin-si, KR;
Seunghwan Jung, Hwaseong-si, KR;
Seokhwan Kim, Cheonan-si, KR;
Sanghyun Jung, Hwaseong-si, KR;
Woodong Kim, Daejeon, KR;
Jaeil Kim, Asan-si, KR;
Ilyoung Jeong, Suwon-si, KR;
Jongkil Han, Bucheon-si, KR;
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Abstract
An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage.