The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Apr. 26, 2022
Applicant:
Deviceeng Co., Ltd., Chungcheongnam-do, KR;
Inventor:
Taek Youb Lee, Chungcheongnam-do, KR;
Assignee:
DEVICEENG CO., LTD., Asan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); B08B 13/00 (2006.01);
U.S. Cl.
CPC ...
B08B 3/12 (2013.01); B08B 13/00 (2013.01);
Abstract
The present invention relates to a substrate treatment apparatus including: a chuck base rotatably disposed around a rotating shaft; chuck pins disposed on top of the chuck base to fix a substrate thereto; and an ultrasonic cleaning unit disposed on top of the chuck base to perform ultrasonic cleaning for the underside of the substrate.
Quick Actions:
Lee, Taek. (2024). Substrate treating apparatus comprising ultrasonic wave cleaning unit (U.S. Patent No. 12059713). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12059713
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile