The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
May. 04, 2021
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Sang Uk Son, Suwon-si, KR;
Sung Wook Kim, Suwon-si, KR;
Won Han, Suwon-si, KR;
Jong Woon Kim, Suwon-si, KR;
Jeong Hoon Ryou, Suwon-si, KR;
Sang Heon Han, Suwon-si, KR;
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Abstract
A bulk acoustic resonator includes a first electrode disposed on an upper side of a substrate, a piezoelectric layer disposed on an upper surface of the first electrode, and a second electrode disposed on an upper surface of the piezoelectric layer, wherein an upper surface of at least one of the first electrode and the second electrode has a recess region, wherein a depth of the recess region is D, a width of the recess region is W, and a resonance frequency is F, and ln is a natural logarithm, and wherein [{ln(D*W)}/(−0.59*F)] is [[ln{0.008 (μm)}]/{−0.59*(3.5 GHz)}] or more and [[ln{0.022 (μm)}]/{−0.59*(3.5 GHz)}] or less.