The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Dec. 22, 2020
Applicant:
Gatan, Inc., Pleasanton, CA (US);
Inventors:
Paul Mooney, Pleasanton, CA (US);
Matthew Lent, Livermore, CA (US);
Julio Kovacs, Pleasanton, CA (US);
David Joyce, Livermore, CA (US);
Assignee:
GATAN, INC., Pleasanton, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/024 (2014.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 31/024 (2013.01); H01L 27/1464 (2013.01); H01L 27/14685 (2013.01);
Abstract
A solid state active pixel image sensor for back illumination by an electron beam is described. The image sensor comprises a thermal conduction layer for heat removal. The image sensor may also comprise a thinned silicon substrate on which an epitaxial layer is formed. The substrate may also be completely removed before or after application of the thermal conduction layer. The thermal conduction layer may comprise a metal, a metal compound, silicon, diamond or graphite.