The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2024

Filed:

Jun. 24, 2021
Applicant:

Fuji Electric Co., Ltd., Kanagawa, JP;

Inventor:

Motoyoshi Kubouchi, Matsumoto, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/73 (2006.01); H01L 29/10 (2006.01); H01L 29/739 (2006.01); H01L 29/861 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 29/1095 (2013.01); H01L 29/861 (2013.01);
Abstract

A semiconductor device includes: an inner region including a base region of a second conductivity type provided between an upper surface of the semiconductor substrate and the drift region; and well regions having a higher doping concentration than that of the base region, provided from the upper surface of the semiconductor substrate to a depth position greater than a lower end of the base region, and arranged with the inner region interposed therebetween at the upper surface of the semiconductor substrate. The inner region includes a longitudinal side in a predetermined longitudinal direction at the upper surface of the semiconductor substrate and a plurality of trench portions which extend from the upper surface of the semiconductor substrate to the drift region. At least one of the trench portions is separated into two or more partial trenches in the longitudinal direction, in a region which does not overlap the well regions.


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