The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Jun. 25, 2020
Applicant:
Kyocera Corporation, Kyoto, JP;
Inventor:
Hiroshi Hamashima, Hikone, JP;
Assignee:
Kyocera Corporation, Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67057 (2013.01); H01L 21/68707 (2013.01); H01L 21/68757 (2013.01);
Abstract
A clamping jig according to the present disclosure includes a supporting portion extending in a vertical direction, and a bent portion connected to a top side of the supporting portion and configured to come into contact with an outer peripheral portion of a substrate. The bent portion includes a base end portion located on a side of the supporting portion and a tip portion connected to the base end portion. At least the tip portion contains a ceramic containing silicon carbide or aluminum oxide as a main component.