The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Mar. 02, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Marcus Blake Freitas, San Ramon, CA (US);
David Masayuki Ishikawa, Mountain View, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G01K 1/14 (2021.01); G01K 11/32 (2021.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); G01K 1/14 (2013.01); G01K 11/32 (2013.01);
Abstract
Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.