The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2024

Filed:

Feb. 16, 2022
Applicant:

Comet Technologies Usa, Inc., San Jose, CA (US);

Inventors:

Tigran Poghosyan, San Jose, CA (US);

Anthony Oliveti, San Jose, CA (US);

J. Kirkwood Rough, San Jose, CA (US);

Assignee:

COMET TECHNOLOGIES USA, INC., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G01R 29/08 (2006.01); H03H 7/38 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); G01R 29/0878 (2013.01); H03H 7/38 (2013.01);
Abstract

An electromagnetic field sensor may include a housing including an opening extending therethrough; a dielectric element including a first section having a first interior space and a second section having a second interior space, the dielectric element being received within the opening of the housing; and a conductor disposed within and approximating the first interior space and the second interior space of the dielectric element, the conductor including a first portion defining a first frustrum shape and a second portion defining a second frustrum shape, the first interior space receiving the first portion of the conductor and the second interior space receiving the second portion of the conductor. The electromagnetic field sensor for use in a matching network of a plasma generation system or other application.


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