The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Jun. 12, 2020
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Hideki Takahashi, Tokyo, JP;
Erina Ogihara, Tokyo, JP;
Pen-Nan Liao, Taoyuan, TW;
Po-Heng Wu, Taoyuan, TW;
Yi Li, Taoyuan, TW;
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Abstract
The present invention addresses the problem of providing a decomposition inhibitor for inhibiting the decomposition of hydrogen peroxide included in an etching liquid composition for titanium nitride. The present invention relates to a decomposition inhibitor that is used to inhibit the decomposition of hydrogen peroxide included in an etching liquid composition for titanium nitride and that includes at least one compound selected from among azole compounds, aminocarboxylic acid compounds, and phosphonic acid compounds as an active component.