The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12052922 B1

Date of Patent:

Jul. 30, 2024

Filed:

Mar. 22, 2021

Piezoelectric thin film, piezoelectric thin film element and piezoelectric transducer

Applicant:

Tdk Corporation, Tokyo, JP;

Inventor:

Junpei Morishita, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:

Faegre Drinker Biddle & Reath LLP

Primary Examiner:

J San Martin

Int. Cl.

CPC ...

H10N 30/00 (2023.01); H10N 30/076 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01);

U.S. Cl.

CPC ...

H10N 30/10516 (2023.02); H10N 30/076 (2023.02); H10N 30/8536 (2023.02); H10N 30/878 (2023.02);

Abstract

Provided is a piezoelectric thin film containing a tetragonal crystalof a perovskite type oxide and a tetragonal crystalof the oxide. A (001) plane of the tetragonal crystaland a (001) plane of the tetragonal crystalare oriented in a normal direction of a surface of the piezoelectric thin film. An interval of the (001) plane of the crystalis c. An interval of a (100) plane of the crystalis a. An interval of the (001) plane of the crystalis c. An interval of a (100) plane of the crystalis a. c/ais more than c/a. A peak intensity of diffracted X-rays of the (001) plane of the crystalis I. A peak intensity of diffracted X-rays of the (001) plane of the crystalis I. I/(I+I) is from 0.50 to 0.90.

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