The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Dec. 03, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Sanjay Bhat, Singapore, SG;
Vibhu Jindal, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3411 (2013.01); C23C 14/352 (2013.01); C23C 14/505 (2013.01); C23C 16/4585 (2013.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01);
Abstract
A physical vapor deposition (PVD) chamber and a method of operation thereof are disclosed. Chambers and methods are described that provide a chamber comprising a deposition ring assembly comprising an inner and outer deposition ring which reduces particle defects.