The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2024

Filed:

Mar. 23, 2020
Applicant:

National Institute of Advanced Industrial Science and Technology, Tokyo, JP;

Inventors:

Katsuhisa Murakami, Tsukuba, JP;

Masayoshi Nagao, Tsukuba, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/312 (2006.01); H01J 1/308 (2006.01);
U.S. Cl.
CPC ...
H01J 1/308 (2013.01); H01J 1/312 (2013.01); H01J 2201/30461 (2013.01);
Abstract

An electron emission device having a narrow electron energy range and excellent electron emitting efficiency, and an electron microscope using the electron emission device. An electron emission device having a laminated structure in which a first electrode, an electron accelerating layer made of an insulating film, and a second electrode are laminated in this order, in which the second electrode through which electrons transmit and from whose surface electrons emit, and the energy width of the emitted electrons is 100 meV or more and 600 meV or less. For example, graphene having one or more layers and 20 layers or less can be used as the second electrode, and hexagonal boron nitride can be used as the insulating film.


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