The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Jul. 06, 2021
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventor:
Gerald Szarek, Chelmsford, MA (US);
Assignee:
Edwards Vacuum LLC, Sanborn, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01);
U.S. Cl.
CPC ...
F04B 37/08 (2013.01);
Abstract
A cryopump with a pump inlet; a two stage refrigerator; a first stage array arranged thermally coupled to a first stage of the two stage refrigerator; and a cryopanel structure coupled to a second stage of the two stage refrigerator. Surfaces of the cryopanel structure have portions that are coated portion with an adsorbent material and other portions that are not coated with the adsorbent material.