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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12049711 B1

PDFFull Text
Date of Patent:
Jul. 30, 2024

Filed:

May. 20, 2019

Method for producing a mechanical vibrator comprising epitaxially growing a cubic crystal on a material layer to form a laminate structure which is patterned to form a vibrator shape part

Applicant:

Nippon Telegraph and Telephone Corporation, Tokyo, JP;

Inventors:

Koji Onomitsu, Tokyo, JP;

Kazuyuki Hirama, Tokyo, JP;

Assignee:

NIPPON TELEGRAPH AND TELEPHONE CORPORATION, Tokyo, JP;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Kenneth A Bratland, Jr

Int. Cl.
CPC ...
C30B 23/02 (2006.01); C23C 16/27 (2006.01); C23C 16/34 (2006.01); C30B 25/18 (2006.01); C30B 29/04 (2006.01); C30B 29/40 (2006.01); C30B 29/68 (2006.01); C30B 33/10 (2006.01);
U.S. Cl.
CPC ...
C30B 29/68 (2013.01); C23C 16/27 (2013.01); C23C 16/342 (2013.01); C30B 23/025 (2013.01); C30B 25/183 (2013.01); C30B 29/04 (2013.01); C30B 29/403 (2013.01); C30B 33/10 (2013.01);
Abstract

A material composed of an element having no catalytic action is epitaxially grown on a nickel layer to form a material layer. For example, iridium is epitaxially grown to form the material layer. Next, a cubic crystal is epitaxially grown on the material layer to form a crystal layer, and a laminate structure including the material layer and the crystal layer is patterned to form a vibrator shape part. The thickness of the material layer is controlled within a range in which lattice relaxation is not complete.

Find Patent Forward Citations

Onomitsu, Koji. (2024). Method for producing a mechanical vibrator comprising epitaxially growing a cubic crystal on a material layer to form a laminate structure which is patterned to form a vibrator shape part (U.S. Patent No. 12049711). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12049711

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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