The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Jun. 10, 2021
Applicant:
Applied Materials, Inc., Santa clara, CA (US);
Inventors:
Xiaowei Wu, San Jose, CA (US);
Jennifer Y. Sun, Fremont, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C30B 29/16 (2006.01); C30B 29/68 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 23/29 (2006.01); H10N 60/85 (2023.01);
U.S. Cl.
CPC ...
C23C 16/405 (2013.01); C23C 14/083 (2013.01); C23C 16/403 (2013.01); C23C 16/45542 (2013.01); C30B 29/16 (2013.01); C30B 29/68 (2013.01); H01J 37/32477 (2013.01); H01L 21/02192 (2013.01); H01L 21/0228 (2013.01); H01L 21/67161 (2013.01); H01L 23/291 (2013.01); H10N 60/855 (2023.02);
Abstract
A lid or other chamber component for a process chamber comprises a) at least one surface comprising a first ceramic material, wherein the first ceramic material comprises YAlOand b) an internal region beneath the at least one surface comprising a second ceramic material, wherein the second ceramic material comprises a combination of AlOand ZrO.