The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Feb. 22, 2023
Applicant:
Alibaba Group Holding Limited, Grand Cayman, KY;
Inventors:
Assignee:
Alibaba Group Holding Limited, Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
H10N 60/12 (2023.01); H01L 21/306 (2006.01); H10N 60/01 (2023.01); H10N 60/80 (2023.01); H10N 69/00 (2023.01);
U.S. Cl.
CPC ...
H10N 60/12 (2023.02); H01L 21/30608 (2013.01); H10N 60/0912 (2023.02); H10N 60/805 (2023.02); H10N 69/00 (2023.02);
Abstract
A hard mask includes a silicon oxide layer provided on a bare silicon wafer; and a silicon nitride layer provided on the silicon oxide layer, wherein the silicon nitride is provided with a first pattern, the silicon oxide layer is provided with a second pattern corresponding to the first pattern, the first pattern and the second pattern have different shapes, and the first pattern and the second pattern are configured to assist in forming a Josephson junction on the bare silicon wafer.