The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 23, 2024

Filed:

Jun. 11, 2020
Applicant:

Kulicke & Soffa Netherlands B.v., Eindhoven, NL;

Inventors:

Matthew R. Semler, Fargo, ND (US);

Samuel Brown, West Fargo, ND (US);

Rudolphus Hendrikus Hoefs, Eindhoven, NL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); G01B 11/27 (2006.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 27/00 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); G01B 11/272 (2013.01); G02B 26/0816 (2013.01); G02B 26/10 (2013.01); G02B 27/0025 (2013.01); H01L 21/6836 (2013.01); H01L 33/005 (2013.01); H01L 2221/68322 (2013.01); H01L 2221/68368 (2013.01); H01L 2221/68381 (2013.01);
Abstract

A method includes determining an alignment error between a discrete component of a discrete component assembly mounted in a laser-assisted transfer system and a target position on a target substrate, the discrete component assembly including the discrete component adhered to a support by a dynamic release layer; based on the alignment error, determining a beam offset characteristic; and providing a signal indicative of the beam offset characteristic to an optical element of the laser-assisted transfer system, the optical element being configured to adjust a position of a beam pattern relative to the discrete component according to the beam offset characteristic.


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