The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 23, 2024

Filed:

Feb. 04, 2021
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventors:

Christopher Bussiere, Groton, MA (US);

Kevin M. Bourbeau, Pepperell, MA (US);

Emilien Joseph Claude Auderbrand, Marlborough, MA (US);

Joseph M. Hallisey, Pepperell, MA (US);

Assignee:

Brooks Automation US, LLC, Chelmsford, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65G 47/90 (2006.01); B65G 49/06 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B65G 47/90 (2013.01); B65G 49/061 (2013.01); H01L 21/67766 (2013.01);
Abstract

A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.


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