The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Nov. 30, 2017
China Triumph International Engineering Co., Ltd., Shanghai, CN;
Ctf Solar Gmbh, Dresden, DE;
Shou Peng, Shanghai, CN;
Michael Harr, Dresden, DE;
Xinjian Yin, Shanghai, CN;
Ganhua Fu, Dresden, DE;
Christian Kraft, Dresden, DE;
Stefan Rau, Dresden, DE;
Bastian Siepchen, Dresden, DE;
China Thumph International Engineering Co., Ltd., Shanghai, CN;
CTF Solar GmbH, Dresden, DE;
Abstract
The present invention relates to a method and an apparatus for determining the position of a substrate within a closed chamber, wherein the substrate is moved within the chamber by a transport system comprising at least one rotating shaft. A load-converting element is provided adjacent to at least one of the rotating shafts, wherein the load-converting element detects a load acting on the at least one rotating shaft and converts it into an electrical parameter. While no substrate is present on the at least one rotating shaft, a first output signal corresponding to a first value of the electrical parameter is measured. The output signal is then monitored and a presence of the substrate on the at least one rotating shaft is detected when the output signal differs from the first output signal by at least a predetermined amount.