The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Sep. 09, 2020
Applicant:
Corning Incorporated, Corning, NY (US);
Inventors:
Sean Matthew Garner, Elmira, NY (US);
Robert George Manley, Vestal, NY (US);
Rajesh Vaddi, Horseheads, NY (US);
Assignee:
Corning Incorporated, Corning, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 21/306 (2006.01); H01L 21/768 (2006.01); H01L 23/15 (2006.01); H01L 23/538 (2006.01);
U.S. Cl.
CPC ...
H01L 21/486 (2013.01); H01L 21/30604 (2013.01); H01L 21/76898 (2013.01); H01L 23/15 (2013.01); H01L 23/5384 (2013.01);
Abstract
Embodiments are related to systems and methods for forming vias in a substrate, and more particularly to systems and methods for reducing substrate surface disruption during via formation.