The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 23, 2024

Filed:

Jan. 15, 2021
Applicant:

Swift Solar Inc., San Carlos, CA (US);

Inventors:

Kevin Alexander Bush, San Francisco, CA (US);

Maximilian Tobias Hoerantner, San Francisco, CA (US);

Tomas Leijtens, Redwood City, CA (US);

Assignee:

Swift Solar Inc., San Carlos, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 35/00 (2006.01); B65G 53/16 (2006.01); C23C 14/06 (2006.01); C23C 14/22 (2006.01); C30B 23/06 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02271 (2013.01); B65G 53/16 (2013.01); C23C 14/0694 (2013.01); C23C 14/228 (2013.01); C30B 23/066 (2013.01);
Abstract

Vapor phase transport systems and methods of depositing perovskite films are described. In an embodiment, a deposition method includes feeding a perovskite solution or constituent powder to a vaporizer, followed by vaporization and depositing the constituent vapor as a perovskite film. In an embodiment, a deposition system and method includes vaporizing different perovskite precursors in different vaporization zones at different temperatures, followed by mixing the vaporized precursors to form a constituent vapor, and depositing the constituent vapor as a perovskite film.


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