The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Apr. 13, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Ga Young Song, Busan, KR;
Mi Hyun Park, Seongnam-si, KR;
Jong Kyoung Park, Suwon-si, KR;
Jung Youl Lee, Anyang-si, KR;
Hyun Jin Kim, Anyang-si, KR;
Hyo San Lee, Hwaseong-si, KR;
Han Sol Lim, Incheon, KR;
Hoon Han, Anyang-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
DONGJIN SEMICHEM CO., LTD., Incheon, KR;
Abstract
A substrate cleaning composition, a method of cleaning a substrate using the same, and a method of fabricating a semiconductor device using the same, the substrate cleaning composition including a styrene copolymer including a first repeating unit represented by Formula 1-1a and a second repeating unit represented by Formula 1-1b; an additive represented by Formula 2-1; and an alcoholic solvent having a solubility of 500 g/L or less in deionized water,