The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Mar. 05, 2020
Nissan Chemical Corporation, Tokyo, JP;
Hiroto Ogata, Toyama, JP;
Hikaru Tokunaga, Toyama, JP;
Hirokazu Nishimaki, Toyama, JP;
Makoto Nakajima, Toyama, JP;
NISSAN CHEMICAL CORPORATION, Tokyo, JP;
Abstract
A resist underlayer film-forming composition revealing high reflow properties while applying and heating the composition on a substrate, allowing a flat application on a multi-level substrate thus forming a flat film. The composition includes a copolymer having a repeating structural unit of the following Formula (1) and/or a repeating structural unit of the following Formula (2) and an organic solvent: (in Formulae (1) and (2), Ris a functional group of Formula (3); in Formula (3), Qand Qare each independently a hydrogen atom or a Calkyl group, and * is a dangling bond to an oxygen atom; and in Formula (2), Xis a Corganic group, and i and j are each independently 0 or 1).