Silicon carbide crystal manufacturing apparatus, control device of silicon carbide crystal manufacturing apparatus, and method of generating learning model and controlling silicon carbide crystal manufacturing apparatus

Abstract

A control device has a learning model that outputs an estimated value of a second physical quantity that is unobservable under a condition of manufacturing a SiC crystal, from a first physical quantity that is observable under the condition of manufacturing the SiC crystal. The control device generates a basic learning model by mechanical learning using, as teacher data, a simulation result of a simulation model based on structural data of a SiC crystal manufacturing apparatus. The control device acquires measured values of the first physical quantity and the second physical quantity measured under a condition that the SiC crystal is unable to be manufactured while the second physical quantity is observable, and generates the learning model that corrects an output of the basic learning model based on the measured values.