The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2024

Filed:

Aug. 10, 2023
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;

Inventors:

Yuichi Sato, Kanagawa, JP;

Ryota Hodo, Kanagawa, JP;

Yuta Iida, Kanagawa, JP;

Tomoaki Moriwaka, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 12/00 (2023.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/321 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H10B 12/30 (2023.02); H01L 21/02266 (2013.01); H01L 21/02274 (2013.01); H01L 21/31116 (2013.01); H01L 21/3212 (2013.01); H01L 23/5329 (2013.01); H10B 12/02 (2023.02);
Abstract

A semiconductor device that can be miniaturized or highly integrated is provided. The semiconductor device includes a transistor and a capacitor. The transistor includes a metal oxide and a first conductor that is electrically connected to the metal oxide. The capacitor includes a first insulator which is provided over the metal oxide and which the first conductor penetrates; a second insulator provided over the first insulator and including an opening reaching the first insulator and the first conductor; a second conductor in contact with an inner wall of the opening, the first insulator, and the first conductor; a third insulator provided over the second conductor; and a fourth conductor provided over the third insulator. The first insulator has higher capability of inhibiting the passage of hydrogen than the second insulator.


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