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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12040229 B1

PDFFull Text
Date of Patent:
Jul. 16, 2024

Filed:

Nov. 18, 2022

Method for forming a structure with a hole

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Dieter Pierreux, Dilbeek, BE;

Steven van Aerde, Tielt-Winge, BE;

Bert Jongbloed, Oud-Heverlee, BE;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Karen Kusumakar

Int. Cl.
CPC ...
H01L 21/768 (2006.01); G11C 5/02 (2006.01); G11C 5/06 (2006.01); H01L 23/538 (2006.01); H10B 41/27 (2023.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H01L 21/76879 (2013.01); G11C 5/025 (2013.01); G11C 5/06 (2013.01); H01L 21/76802 (2013.01); H01L 23/5384 (2013.01); H10B 41/27 (2023.02); H10B 43/27 (2023.02);
Abstract

A method for forming a structure with a hole on a substrate is disclosed. The method may comprise: depositing a first structure on the substrate; etching a first part of the hole in the first structure; depositing a plug fill in the first part of the hole; depositing a second structure on top of the first structure; etching a second part of the hole substantially aligned with the first part of the hole in the second structure; and, etching the plug fill of the first part of the hole and thereby opening up the hole by dry etching. In this way 3-D NAND device may be provided.

Find Patent Forward Citations

Pierreux, Dieter. (2024). Method for forming a structure with a hole (U.S. Patent No. 12040229). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12040229

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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