The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2024
Filed:
Jan. 24, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Eric Hill, Goodyear, AZ (US);
John DiSanto, Scottsdale, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); C30B 25/08 (2006.01); C30B 25/12 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); C23C 16/4581 (2013.01); C23C 16/4584 (2013.01); C23C 16/4586 (2013.01); C30B 25/08 (2013.01); C30B 25/12 (2013.01); H01L 21/67028 (2013.01); H01L 21/67069 (2013.01); H01L 21/67248 (2013.01); H01L 21/68792 (2013.01); H01L 21/67126 (2013.01); H01L 21/68757 (2013.01);
Abstract
A substrate support assembly suitable for use in a reactor including a common processing and substrate transfer region is disclosed. The substrate support assembly includes a susceptor and one or more lift pins that can be used to lower a substrate onto a surface of the susceptor and raise the substrate from the surface, to allow transfer of the substrate from the processing region, without raising or lowering the susceptor.