The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2024

Filed:

Aug. 17, 2021
Applicant:

Samsung Display Co., Ltd., Yongin-Si, KR;

Inventors:

Hiroshi Okumura, Hwaseong-si, KR;

Jongjun Baek, Seoul, KR;

Byung Soo So, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); G02B 5/04 (2006.01); G02B 26/10 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02691 (2013.01); G02B 5/045 (2013.01); G02B 26/101 (2013.01); H01L 21/02678 (2013.01);
Abstract

A laser irradiation apparatus includes a laser light source which emits a laser beam, a first lens through which the laser beam emitted from the laser light source passes, a first scanner which reflects the laser beam passing through the first lens and changes a direction of the laser beam, a second scanner which reflects the laser beam deflected by the first scanner and changes a direction of the laser beam, a plurality of second lenses through which the laser beam deflected by the second scanner passes, where at least one of the plurality of second lenses is configured to vibrate in one direction, and an optical element through which the laser beam passing through the plurality of second lenses passes, where the optical element is configured to correct an incident angle of the laser beam incident a substrate.


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