The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2024
Filed:
Apr. 26, 2022
Elemental Scientific, Inc., Omaha, NE (US);
Kevin Wiederin, Omaha, NE (US);
Daniel R. Wiederin, Omaha, NE (US);
Elemental Scientific, Inc., Omaha, NE (US);
Abstract
Stabilization of an inductively coupled plasma mass spectrometer during analysis of semiconductor-grade chemical samples is described. A method embodiment includes, but is not limited to, transferring an aerosolized sample of a semiconductor-grade chemical into a hydrofluoric-acid resistant spray chamber; passing at least a portion of the aerosolized sample through an outlet tube of the hydrofluoric-acid resistant spray chamber; and introducing an impingement gas into the outlet tube of the hydrofluoric-acid resistant spray chamber to induce turbulence within the outlet tube to at least one of condition or remove large aerosol particles.