The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2024
Filed:
Nov. 22, 2018
Applicant:
Contamination Control Services Inc., Sagamihara, JP;
Inventor:
Toyohiko Shindo, Sagamihara, JP;
Assignee:
Contamination Control services Inc., Sagamihara, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F04F 5/10 (2006.01); F04F 5/46 (2006.01);
U.S. Cl.
CPC ...
F04F 5/46 (2013.01); F04F 5/10 (2013.01); H01L 21/67051 (2013.01); H01L 21/67103 (2013.01); Y10T 137/87603 (2015.04);
Abstract
Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generatorcomprises a spray portthat can be attached to/removed from a pipe memberthrough which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member. A rotational flow generated by the rotational flow generatorcan reduce the amount of accretion on an inner wall of the pipe member