The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Jul. 22, 2021
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
In Hyuk Kim, Hwaseong-si, KR;
Dong Gyun Kim, Seoul, KR;
Jae Hoon Jung, Seoul, KR;
Jin Oh Kwag, Yongin-si, KR;
Hee Yeon Yoo, Hwaseong-si, KR;
Sung Chan Jo, Seoul, KR;
Jeong In Choi, Asan-si, KR;
Hye Jung Hong, Cheonan-si, KR;
Jong Hyuk Kang, Suwon-si, KR;
Dong Eon Lee, Hwaseong-si, KR;
Hyun Min Cho, Seoul, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/075 (2006.01); H01L 21/68 (2006.01); H01L 21/78 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 25/0753 (2013.01); H01L 21/68 (2013.01); H01L 21/7806 (2013.01); H01L 33/005 (2013.01);
Abstract
An apparatus includes a base including a receiving portion that receives a substrate on which semiconductor elements are disposed; and at least one ultrasonic generator that generates and applies ultrasonic waves to the substrate placed in the base.