The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Jul. 22, 2020
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Hiroyuki Yasuda, Tokyo, JP;
Yuichiro Hashimoto, Tokyo, JP;
Yuka Sugawara, Tokyo, JP;
Riku Tamura, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/06 (2006.01); G01N 30/72 (2006.01); G01N 35/00 (2006.01); H01J 49/24 (2006.01); H01J 49/42 (2006.01); G01N 30/32 (2006.01);
U.S. Cl.
CPC ...
H01J 49/063 (2013.01); G01N 30/72 (2013.01); G01N 35/00584 (2013.01); H01J 49/24 (2013.01); H01J 49/42 (2013.01); G01N 2030/326 (2013.01); G01N 2030/328 (2013.01);
Abstract
There is provided a mass spectrometer that can appropriately maintain the atmospheric pressure of a vacuum chamber, and a method of controlling the same. An example of a mass spectrometer according to the present invention includes first vacuum chambers, first vacuum pumps, an atmospheric pressure relating value acquiring unit, and an adjustment unit configured to adjust the effective exhaust velocity of the first vacuum pumps, and controllers. The controllers control the adjustment unit corresponding to an atmospheric pressure relating value.